Synthesis of high-density carbon nanotube films by microwave plasma chemical vapor deposition
نویسندگان
چکیده
Nanotubes with diameters ranging from 20 to 400 nm and densities in the range of 108 109 cm 2, produced on metal-coated Ž . Ž . silicon by microwave plasma chemical vapor deposition, show various shapes depending upon: i growth conditions; and ii preor post-growth treatment of the samples. Presence of nitrogen in the growth or pre-growth atmosphere increases the density and vertical growth rate of nanotubes. The growth rate on an iron-coated substrate is higher than on a nickel-coated substrate. A cleaning procedure, consisting of ultrasonic treatment of nanotubes in methanol, is demonstrated. 2001 Elsevier Science B.V. All rights reserved. Ž .
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